1200C CVD system tube furnace

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1200C CVD system tube furnace
Posting date : Mar 13, 2014
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85-
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Description The system is widely used for various CVD experimental reaction temperature at 1100 ℃, can also be used for: vacuum sintering, vacuum protective atmosphere sintering, nanomaterials preparation, battery materials preparation and other research fields Main components: 1. The MiNi type tubular furnace; Three road float gas ratio; Vacuum pump; 4. The thick wall silicone tube vacuum piping technical parameters Champer type:Open type Display mode :Touch screen Limiting temperature:1200℃ Working temperature:≤1150℃ Heating rate:≤20℃(suggestion:10℃/min) Heating zone:Single Heating zone length:220mm Constant temperature district:110mm Furnace tube material:High purity quartz Routine furnace tube diameter:50mm :60mm The furnace tube length:700mm Packing type:Stainless steel vacuum flange Gas tightness:Vacuum flange and corundum furnace tube up to4.03×10-3Pa Control mode:PID Temperature control Temperature control accuracy:±1℃ Temperature measurer:K-Thermocouple Electrical certification:CE Power supply:220V 50Hz~60Hz Total power:2.5KW Gas channels:Three kinds of gas source can be attached The flow meter:Float flowmeter A road range:10~100ml/min B road range:16~160ml/min C road range:25~250ml/min Pneumatic pressure:-0.1~0.15 MPa Warranty :12 months warranty, lifetime warranty Accessories included :Quartz tube, vacuum flange, furnace tube jam, type O sealing ring, protective gloves, crucible furnace hook, specification, ptfe tube, stainless steel card sets of joints, stainless steel bellows, KF adapter, 5 mm Allen wrench The size of a complete set:L:700mm;E:600mm;H:1190mm

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