desktop one-target DC magnetron sputter vacuum pvd metallic coater

Product

Posting date : Jul 17, 2020

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Membership

Free Member Scince Jul 13, 2020

FOB Price

10000

Min. Order Quantity

Supply Abillity

Port

qingdao,shanghai,

Payment Terms

T/T, L/C, Pay Later,Western Union,VISA

Package

wooden box packaging

Keyword :

magnetron sputtering

Small desktop single-target DC magnetron sputtering coater CY-MSP180G-DC

a cost-effective magnetron sputtering coating equipment independently developed by our company. It has the characteristics of miniaturization and standardization.
The magnetron target head has 1 inch and 2 inches to choose from. Customers can choose the target according to the size of the substrate to be plated.
The device is equipped with 150W DC power supply, which can be used for metal sputter coating.
The coating machine is equipped with gas inlet port for the introduction of protective gas. If the customer needs the mixed gases, the staff can be contacted to configure the high-precision mass flow meter to meet the experimental needs.
The instrument is equipped with advanced turbomolecular pump set, the ultimate vacuum is up to 1.0E-5pa, and other types of molecular pumps are also available.

Application:vacuum pvd metallic coater

The device can be used to prepare single-layer ferroelectric thin films, conductive films, alloy films, and so on. Compared with similar equipment, the single-target magnetron sputtering coater is compact, highly integrated and small in size, and can be placed on a desktop. It is an ideal equipment for laboratory preparation of material films.

Technical parameters:vacuum pvd metallic coater

Sample stage	Size：φ138mm Temperature control accuracy：±1℃ Heating temperature：Max 500℃ Rotate speed：1-20rpm adjustable
Magnetron Sputtering target head	2-inch×1 (1-inch,2-inch optional) Circulating water chiller with flow rate of 10L/min
Vacuum chamber	Chamber size:φ180mm×215mm Watch window:Omnidirectional transparent Chamber material:High purity quartz Opening mode:Top cover removable
Vacuum system	Model：CY-GZK103-A Pumping interface:KF40 Molecular pump:CY-600 Exhaust interface:KF16 Backing pump:rotary vane pump Vacuum measurement：Compound vacuum gauge Ultimate vacuum：1.0E-5Pa Power supply：AC;220V 50/60Hz Pumping rate：Molecular pump: 600L/S rotary vane pump: 1.1L/S Comprehensive gas pumping performance: vacuum up to 1.0E-3Pa in 20 minutes
Power configuration	DC power supply x1；Max output power 150W
Other parameters	Supply voltage：AC220V,50Hz Overall size：500mm×350mm×400mm Total power：1.7KW (Vacuum pump1.5KW+machine0.2KW) Total Weight：About 30kg