|
Material
|
Quartz Crystal
|
|||
|
Cutting Angle
|
X/Y/Z/AT32、33、36/BT/ST42.75°-cut etc
|
|||
|
Diameter/size
|
3”(76.2mm)
|
4” (100mm)
|
6"(150mm)
|
8"(200mm)
|
|
Tol(±)
|
<0.20 mm
|
|||
|
Thinnest Thickness
|
0.08mm Min
|
0.10mm Min
|
0.20mm Min
|
0.35mm or more
|
|
Primary Flat
|
22mm
|
32mm
|
42.5mm
|
57.5mm
|
|
LTV (5mmx5mm)
|
<1µm
|
|||
|
TTV
|
<3µm
|
|||
|
Bow
|
-30
|
|||
|
Warp
|
<40µm
|
|||
|
PLTV(<0.5um)
|
≥95%(5mm*5mm)
|
|||
|
Orientation Flat
|
All available
|
|||
|
Surface Type
|
Single Side Polished /Double Sides Polished
|
|||
|
Polished side Ra
|
<0.5nm
|
|||
|
Back Side Criteria
|
General is 0.2-0.5µm or as customized
|
|||
|
Edge Criteria
|
R=0.2mm or Bullnose
|
|||
|
Material Property
|
ECD
|
Better than grade 4
|
||
|
Inclusion
|
Better than grade II
|
|||
|
Q-Value
|
Better than grade C
|
|||
|
Wafer Surface Criteria
|
Particles ¢>0.3 µ m
|
<= 30
|
||
|
Scratch , Chipping
|
None
|
|||
|
Defect
|
No edge cracks, scratches, saw marks, stains
|
|||
|
Packaging
|
Qty/Wafer box
|
25pcs per box
|
||