Material
|
Quartz Crystal
|
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Cutting Angle
|
X/Y/Z/AT32、33、36/BT/ST42.75°-cut etc
|
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Diameter/size
|
3”(76.2mm)
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4” (100mm)
|
6"(150mm)
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8"(200mm)
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Tol(±)
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<0.20 mm
|
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Thinnest Thickness
|
0.08mm Min
|
0.10mm Min
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0.20mm Min
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0.35mm or more
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Primary Flat
|
22mm
|
32mm
|
42.5mm
|
57.5mm
|
LTV (5mmx5mm)
|
<1µm
|
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TTV
|
<3µm
|
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Bow
|
-30
|
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Warp
|
<40µm
|
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PLTV(<0.5um)
|
≥95%(5mm*5mm)
|
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Orientation Flat
|
All available
|
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Surface Type
|
Single Side Polished /Double Sides Polished
|
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Polished side Ra
|
<0.5nm
|
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Back Side Criteria
|
General is 0.2-0.5µm or as customized
|
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Edge Criteria
|
R=0.2mm or Bullnose
|
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Material Property
|
ECD
|
Better than grade 4
|
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Inclusion
|
Better than grade II
|
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Q-Value
|
Better than grade C
|
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Wafer Surface Criteria
|
Particles ¢>0.3 µ m
|
<= 30
|
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Scratch , Chipping
|
None
|
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Defect
|
No edge cracks, scratches, saw marks, stains
|
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Packaging
|
Qty/Wafer box
|
25pcs per box
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