| Display | 4 digits, 10 mm LCD, with blue backlight | |
| Parameters | Ra、Rz、Rq、Rt | |
| Measuring Range
|
Ra,Rq:0.005~16.00 um / 0.020~629.9 uinch
Rz,Rt:0.020~160.0 um / 0.078~6299 uinch
|
|
| Accuracy | ≤ ± 10% | |
| Fluctuation of display value | Not more than 6% | |
| Sensor | Test Principle | Inductance type |
| Radius of Probe Pin | 5 um | |
| Material of Probe Pin | Diamond | |
| Measurement Force of Probe | 4 mN(0.4 gf) | |
| Probe Angle | 90° | |
| Vertical Radius of Guiding Head | 48 mm | |
| Maximum driving stroke | 17.5 mm / 0.7 inch | |
| Cutoff length (l) | 0.25 mm / 0.8 mm / 2.5 mm optional | |
| Driving speed | Sampling | When Length = 0.25 mm, Vt = 0.135 mm/s |
| When Length = 0.8 mm, Vt = 0.5 mm/s | ||
| When Length = 2.5 mm, Vt = 1 mm/s | ||
| Returning | Vt = 1 mm/s | |
| Profile digital filter | Filtered Profile | RC,PC-RC,GAUSS |
| Non-Filtered Profile | D-P | |
| Resolution | 0.001 um, if reading < 10um | |
| 0.01 um, if 10um ≤ reading ≤ 100um | ||
| 0.1 um, if reading ≥ 100um | ||
| Evaluation length | 1~5 L optional | |
| Auto Power Off | ||
| Data Memorize | 7 Groups | |
| Operating conditions | Temperature: 0~50 ℃ Humidity: < 80 %RH | |
| Power Supply | Built-in rechargeable Li-ion battery | |
| Dimensions | 140 × 52 × 48 mm | |
| Weight | 420 g | |